Mechanical properties of ultrathin ALD Al2O3 films

Mechanical properties of ultrathin ALD Al₂O₃ films

Research output: Contribution to conference › Paper › Scientific

Original language	English
Publication status	Published - 2017
MoE publication type	Not Eligible
Event	Joint EuroCVD 21 – Baltic ALD 15 Conference - Linköping, Sweden Duration: 11 Jun 2017 → 14 Jun 2017 http://www.eurocvd-balticald2017.se/

Conference	Joint EuroCVD 21 – Baltic ALD 15 Conference
Country	Sweden
City	Linköping
Period	11/06/2017 → 14/06/2017
Internet address	http://www.eurocvd-balticald2017.se/

01/06/2016 → 31/05/2017

Project: Business Finland: Other research funding

Facility/equipment: Facility

Facility/equipment: Facility

Facility/equipment: Facility

Rontu, V., Hokkanen, A., & Franssila, S. (2017). Mechanical properties of ultrathin ALD Al₂O₃ films. Paper presented at Joint EuroCVD 21 – Baltic ALD 15 Conference, Linköping, Sweden.

@conference{63518dd64f454bddb4c8163ef4199369,

title = "Mechanical properties of ultrathin ALD Al2O3 films",

author = "Ville Rontu and Ari Hokkanen and Sami Franssila",

year = "2017",

language = "English",

note = "Joint EuroCVD 21 – Baltic ALD 15 Conference ; Conference date: 11-06-2017 Through 14-06-2017",

url = "http://www.eurocvd-balticald2017.se/",

}