Mechanical properties of ultrathin ALD Al2O3 films

Research output: Contribution to conferencePaperScientific

Original languageEnglish
Publication statusPublished - 2017
MoE publication typeNot Eligible
EventJoint EuroCVD 21 – Baltic ALD 15 Conference - Linköping, Sweden
Duration: 11 Jun 201714 Jun 2017
http://www.eurocvd-balticald2017.se/

Conference

ConferenceJoint EuroCVD 21 – Baltic ALD 15 Conference
CountrySweden
CityLinköping
Period11/06/201714/06/2017
Internet address

Projects

Superwindows - a new look at the world through supertransparent windows

Franssila, S., Hoshian, S. & Rontu, V.

01/06/201631/05/2017

Project: Business Finland: Other research funding

Equipment

OtaNano

Anna Rissanen (Manager)

Aalto University

Facility/equipment: Facility

  • Cite this

    Rontu, V., Hokkanen, A., & Franssila, S. (2017). Mechanical properties of ultrathin ALD Al2O3 films. Paper presented at Joint EuroCVD 21 – Baltic ALD 15 Conference, Linköping, Sweden.