Mechanical properties of ultrathin ALD Al2O3 films

Research output: Contribution to conferencePaperScientific

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Details

Original languageEnglish
Publication statusPublished - 2017
MoE publication typeNot Eligible
EventJoint EuroCVD 21 – Baltic ALD 15 Conference - Linköping, Sweden
Duration: 11 Jun 201714 Jun 2017
http://www.eurocvd-balticald2017.se/

Conference

ConferenceJoint EuroCVD 21 – Baltic ALD 15 Conference
CountrySweden
CityLinköping
Period11/06/201714/06/2017
Internet address

ID: 15011596