Mechanical Properties of Silicon Microstructures

Engineering

• Elastic Energy 100%
• Diamond 100%
• Silicon Material 50%
• Experimental Investigation 50%
• Micro Machining 50%
• Microelectromechanical System 50%
• Bulk Silicon 50%
• Dimensionality 50%
• Elastic Strain 50%
• Theoretical Investigation 50%
• Special Interest 50%
• Crystalline Silicon 50%
• Structural Property 50%
• Field Method 50%
• Nonlinearity 50%
• Lattice Constant 50%
• Harmonics 50%
• Electricity Generation 50%
• Ground State 50%
• Actuator 50%
• Lattice Parameter 50%
• Extended Defect 50%
• Crystallizes 50%
• Dislocation Line 50%
• Partial Dislocation 50%

Material Science

• Silicon 100%
• Diamond 25%
• Microelectromechanical System 12%
• Lattice Constant 12%
• Theoretical Calculation 12%
• Actuator 12%
• Silicon Material 12%
• Micromachining 12%
• Bulk Silicon 12%
• Structural Property 12%
• Crystal Defect 12%