Mechanical assessment of suspended ALD thin films by bulge and shaft loading techniques

Maria Berdova; Tuomo Ylitalo; Ivan Kassamakov; Jouni Heino; Pekka Törmä; Lauri Kilpi; Helena Ronkainen; Jari Koskinen; Edward Hæggström; Sami Franssila

doi:10.1016/j.actamat.2013.11.024

Mechanical assessment of suspended ALD thin films by bulge and shaft loading techniques

Maria Berdova
, Tuomo Ylitalo
, Ivan Kassamakov
, Jouni Heino
, Pekka Törmä
, Lauri Kilpi
, Helena Ronkainen
, Jari Koskinen
, Edward Hæggström
, Sami Franssila

Department of Chemistry and Materials Science

Research output: Contribution to journal › Article › Scientific › peer-review

52 Citations (Scopus)

Original language	English
Pages (from-to)	370-377
Number of pages	8
Journal	Acta Materialia
Volume	66
DOIs	https://doi.org/10.1016/j.actamat.2013.11.024
Publication status	Published - Mar 2014
MoE publication type	A1 Journal article-refereed

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10.1016/j.actamat.2013.11.024

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@article{600989aa48ab4304b8491e7d153822fb,

title = "Mechanical assessment of suspended ALD thin films by bulge and shaft loading techniques",

author = "Maria Berdova and Tuomo Ylitalo and Ivan Kassamakov and Jouni Heino and Pekka T{\"o}rm{\"a} and Lauri Kilpi and Helena Ronkainen and Jari Koskinen and Edward H{\ae}ggstr{\"o}m and Sami Franssila",

year = "2014",

month = mar,

doi = "10.1016/j.actamat.2013.11.024",

language = "English",

volume = "66",

pages = "370--377",

journal = "Acta Materialia",

issn = "1359-6454",

publisher = "Elsevier",

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TY - JOUR

T1 - Mechanical assessment of suspended ALD thin films by bulge and shaft loading techniques

AU - Berdova, Maria

AU - Ylitalo, Tuomo

AU - Kassamakov, Ivan

AU - Heino, Jouni

AU - Törmä, Pekka

AU - Kilpi, Lauri

AU - Ronkainen, Helena

AU - Koskinen, Jari

AU - Hæggström, Edward

AU - Franssila, Sami

PY - 2014/3

Y1 - 2014/3

UR - http://dx.doi.org/10.1016/j.actamat.2013.11.024

U2 - 10.1016/j.actamat.2013.11.024

DO - 10.1016/j.actamat.2013.11.024

M3 - Article

SN - 1359-6454

VL - 66

SP - 370

EP - 377

JO - Acta Materialia

JF - Acta Materialia

ER -

Mechanical assessment of suspended ALD thin films by bulge and shaft loading techniques

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