Mechanical assessment of suspended ALD thin films by bulge and shaft loading techniques

Maria Berdova, Tuomo Ylitalo, Ivan Kassamakov, Jouni Heino, Pekka Törmä, Lauri Kilpi, Helena Ronkainen, Jari Koskinen, Edward Hæggström, Sami Franssila

Research output: Contribution to journalArticleScientificpeer-review

34 Citations (Scopus)
Original languageEnglish
Pages (from-to)370-377
Number of pages8
JournalActa Materialia
Publication statusPublished - Mar 2014
MoE publication typeA1 Journal article-refereed

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