Mechanical and optical properties of as-grown and thermally annealed titanium dioxide from titanium tetrachloride and water by atomic layer deposition

Oili M.E. Ylivaara*, Andreas Langner, Xuwen Liu, Dieter Schneider, Jaakko Julin, Kai Arstila, Sakari Sintonen, Saima Ali, Harri Lipsanen, Timo Sajavaara, Simo-Pekka Hannula, Riikka L. Puurunen

*Corresponding author for this work

Research output: Contribution to journal › Article › Scientific › peer-review

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