Measurement of dielectric constants of thin films on substrates

S.N. Dudorov; D.V. Lioubtchenko; J.A. Mallat; A.V. Räisänen

Measurement of dielectric constants of thin films on substrates

S.N. Dudorov
, D.V. Lioubtchenko
, J.A. Mallat
, A.V. Räisänen

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

Abstract

An open resonator method is described for measurement of dielectric properties of thin (compared to the wavelength) films deposited onto substrates. It s based on measurements of resonant frequency shifts caused by the presence of the film on the substrate. The permittivity of AZ4562 photoresist film was measured to be about 2.9
after depositing it onto different substrates.

Original language	English
Title of host publication	Third Annual SMARAD Centre of Excellence Research Seminar, Espoo, Finland, 2005
Publisher	Teknillinen korkeakoulu
Pages	16-19
ISBN (Print)	951-22-7617-8
Publication status	Published - 2005
MoE publication type	A4 Conference publication

Cite this

@inproceedings{f47565b3177a4f3eb5850f3aa237041e,

title = "Measurement of dielectric constants of thin films on substrates",

abstract = "An open resonator method is described for measurement of dielectric properties of thin (compared to the wavelength) films deposited onto substrates. It s based on measurements of resonant frequency shifts caused by the presence of the film on the substrate. The permittivity of AZ4562 photoresist film was measured to be about 2.9 after depositing it onto different substrates.",

author = "S.N. Dudorov and D.V. Lioubtchenko and J.A. Mallat and A.V. R{\"a}is{\"a}nen",

year = "2005",

language = "English",

isbn = "951-22-7617-8",

pages = "16--19",

booktitle = "Third Annual SMARAD Centre of Excellence Research Seminar, Espoo, Finland, 2005",

publisher = "Teknillinen korkeakoulu",

address = "Finland",

}

Measurement of dielectric constants of thin films on substrates. / Dudorov, S.N.; Lioubtchenko, D.V.; Mallat, J.A. et al.
Third Annual SMARAD Centre of Excellence Research Seminar, Espoo, Finland, 2005. Teknillinen korkeakoulu, 2005. p. 16-19.

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

TY - GEN

T1 - Measurement of dielectric constants of thin films on substrates

AU - Dudorov, S.N.

AU - Lioubtchenko, D.V.

AU - Mallat, J.A.

AU - Räisänen, A.V.

PY - 2005

Y1 - 2005

N2 - An open resonator method is described for measurement of dielectric properties of thin (compared to the wavelength) films deposited onto substrates. It s based on measurements of resonant frequency shifts caused by the presence of the film on the substrate. The permittivity of AZ4562 photoresist film was measured to be about 2.9 after depositing it onto different substrates.

AB - An open resonator method is described for measurement of dielectric properties of thin (compared to the wavelength) films deposited onto substrates. It s based on measurements of resonant frequency shifts caused by the presence of the film on the substrate. The permittivity of AZ4562 photoresist film was measured to be about 2.9 after depositing it onto different substrates.

M3 - Conference article in proceedings

SN - 951-22-7617-8

SP - 16

EP - 19

BT - Third Annual SMARAD Centre of Excellence Research Seminar, Espoo, Finland, 2005

PB - Teknillinen korkeakoulu

ER -

Measurement of dielectric constants of thin films on substrates

Abstract

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