Measurement of 3-D vibrations in RF MEMS resonators using Michelson laser interferometer

Olli Holmgren, Kimmo Kokkonen, Matti Kaivola

Research output: Working paper › Professional

Original language	English
Place of Publication	Lappeenranta
Pages	45
Publication status	Published - 2007
MoE publication type	D4 Published development or research report or study

Name	VIII Optics Days, 3.-4.5.2007, Lappeenranta
Publisher	Finnish Optical Society

Cite this

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title = "Measurement of 3-D vibrations in RF MEMS resonators using Michelson laser interferometer",

author = "Olli Holmgren and Kimmo Kokkonen and Matti Kaivola",

year = "2007",

language = "English",

series = "VIII Optics Days, 3.-4.5.2007, Lappeenranta",

publisher = "Finnish Optical Society",

pages = "45",

type = "WorkingPaper",

institution = "Finnish Optical Society",

}

TY - UNPB

T1 - Measurement of 3-D vibrations in RF MEMS resonators using Michelson laser interferometer

AU - Holmgren, Olli

AU - Kokkonen, Kimmo

AU - Kaivola, Matti

PY - 2007

Y1 - 2007

M3 - Working paper

T3 - VIII Optics Days, 3.-4.5.2007, Lappeenranta

SP - 45

BT - Measurement of 3-D vibrations in RF MEMS resonators using Michelson laser interferometer

CY - Lappeenranta

ER -