| Original language | English |
|---|---|
| Title of host publication | MICRO STRUCTURE WORKSHOP, Västerås, Ruotsi, 2006 |
| Publication status | Published - 2006 |
| MoE publication type | A4 Article in a conference publication |
Mask material effects in cryogenic DRIE
Lauri Sainiemi, Sami Franssila
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Scientific › peer-review