Mask material effects in cryogenic DRIE

Lauri Sainiemi, Sami Franssila

    Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

    Original languageEnglish
    Title of host publicationMICRO STRUCTURE WORKSHOP, Västerås, Ruotsi, 2006
    Publication statusPublished - 2006
    MoE publication typeA4 Article in a conference publication

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