Mapping of the reading dislocations pile-up in Si1-xGex virtual substrates with low angle grazing incidence x-ray topography

W.M. Chen; G.D.M. Dilliway; P.J. McNally; T. Tuomi; A.F.W. Willoughby; J. Bonar; L. Knuuttila; J. Riikonen; J. Toivonen

Mapping of the reading dislocations pile-up in Si_1-xGe_x virtual substrates with low angle grazing incidence x-ray topography

W.M. Chen, G.D.M. Dilliway, P.J. McNally, T. Tuomi, A.F.W. Willoughby, J. Bonar, L. Knuuttila, J. Riikonen, J. Toivonen

Research output: Working paper › Professional

Original language	English
Place of Publication	Hampuri
Pages	331-332
Publication status	Published - 2003
MoE publication type	D4 Published development or research report or study

Publication series

Name	HASYLAB-DESY Annual Report 2002, Part I

Keywords

silicon-germanium alloy
synchrotron x-ray topography
threading dislocations

Cite this

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title = "Mapping of the reading dislocations pile-up in Si1-xGex virtual substrates with low angle grazing incidence x-ray topography",

keywords = "silicon-germanium alloy, synchrotron x-ray topography, threading dislocations, silicon-germanium alloy, synchrotron x-ray topography, threading dislocations, silicon-germanium alloy, synchrotron x-ray topography, threading dislocations",

author = "W.M. Chen and G.D.M. Dilliway and P.J. McNally and T. Tuomi and A.F.W. Willoughby and J. Bonar and L. Knuuttila and J. Riikonen and J. Toivonen",

year = "2003",

language = "English",

series = "HASYLAB-DESY Annual Report 2002, Part I",

pages = "331--332",

type = "WorkingPaper",

}

Mapping of the reading dislocations pile-up in Si_1-xGe_x virtual substrates with low angle grazing incidence x-ray topography. / Chen, W.M.; Dilliway, G.D.M.; McNally, P.J.; Tuomi, T.; Willoughby, A.F.W.; Bonar, J.; Knuuttila, L.; Riikonen, J.; Toivonen, J.

Hampuri, 2003. p. 331-332 (HASYLAB-DESY Annual Report 2002, Part I).

Research output: Working paper › Professional

TY - UNPB

T1 - Mapping of the reading dislocations pile-up in Si1-xGex virtual substrates with low angle grazing incidence x-ray topography

AU - Chen, W.M.

AU - Dilliway, G.D.M.

AU - McNally, P.J.

AU - Tuomi, T.

AU - Willoughby, A.F.W.

AU - Bonar, J.

AU - Knuuttila, L.

AU - Riikonen, J.

AU - Toivonen, J.

PY - 2003

Y1 - 2003

KW - silicon-germanium alloy

KW - synchrotron x-ray topography

KW - threading dislocations

KW - silicon-germanium alloy

KW - synchrotron x-ray topography

KW - threading dislocations

KW - silicon-germanium alloy

KW - synchrotron x-ray topography

KW - threading dislocations

M3 - Working paper

T3 - HASYLAB-DESY Annual Report 2002, Part I

SP - 331

EP - 332

BT - Mapping of the reading dislocations pile-up in Si1-xGex virtual substrates with low angle grazing incidence x-ray topography

CY - Hampuri

ER -