Mapping of the reading dislocations pile-up in Si1-xGex virtual substrates with low angle grazing incidence x-ray topography

W.M. Chen, G.D.M. Dilliway, P.J. McNally, T. Tuomi, A.F.W. Willoughby, J. Bonar, L. Knuuttila, J. Riikonen, J. Toivonen

    Research output: Working paperProfessional

    Original languageEnglish
    Place of PublicationHampuri
    Pages331-332
    Publication statusPublished - 2003
    MoE publication typeD4 Published development or research report or study

    Publication series

    NameHASYLAB-DESY Annual Report 2002, Part I

    Keywords

    • silicon-germanium alloy
    • synchrotron x-ray topography
    • threading dislocations

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