Major improvement og long-term stability of SOI-microresonators by encapsulation

Mika Koskenvuori; Tomi Mattila; Ari Häärä; Jyrki Kiihamäki; Pekka Rantakari; Aarne Oja; Heikki Seppä; Ilkka Tittonen

Major improvement og long-term stability of SOI-microresonators by encapsulation

Mika Koskenvuori, Tomi Mattila, Ari Häärä, Jyrki Kiihamäki, Pekka Rantakari, Aarne Oja, Heikki Seppä, Ilkka Tittonen

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

Original language	English
Title of host publication	Eurosensors XVIII, Rome, Italy, September 12-15 2004
Pages	550-551
Publication status	Published - 2004
MoE publication type	A4 Conference publication

Cite this

@inproceedings{122058e95d484ae1bc376c38393ed4ff,

title = "Major improvement og long-term stability of SOI-microresonators by encapsulation",

author = "Mika Koskenvuori and Tomi Mattila and Ari H{\"a}{\"a}r{\"a} and Jyrki Kiiham{\"a}ki and Pekka Rantakari and Aarne Oja and Heikki Sepp{\"a} and Ilkka Tittonen",

year = "2004",

language = "English",

pages = "550--551",

booktitle = "Eurosensors XVIII, Rome, Italy, September 12-15 2004",

}

TY - GEN

T1 - Major improvement og long-term stability of SOI-microresonators by encapsulation

AU - Koskenvuori, Mika

AU - Mattila, Tomi

AU - Häärä, Ari

AU - Kiihamäki, Jyrki

AU - Rantakari, Pekka

AU - Oja, Aarne

AU - Seppä, Heikki

AU - Tittonen, Ilkka

PY - 2004

Y1 - 2004

M3 - Conference article in proceedings

SP - 550

EP - 551

BT - Eurosensors XVIII, Rome, Italy, September 12-15 2004

ER -