Major improvement og long-term stability of SOI-microresonators by encapsulation

Mika Koskenvuori, Tomi Mattila, Ari Häärä, Jyrki Kiihamäki, Pekka Rantakari, Aarne Oja, Heikki Seppä, Ilkka Tittonen

Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

Original languageEnglish
Title of host publicationEurosensors XVIII, Rome, Italy, September 12-15 2004
Pages550-551
Publication statusPublished - 2004
MoE publication typeA4 Article in a conference publication

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