Magnesium aluminate thin films by atomic layer deposition from organometallic precursors and water

Matti Putkonen, M. Nieminen, L. Niinistö

    Research output: Contribution to journalArticleScientificpeer-review

    14 Citations (Scopus)
    Original languageEnglish
    Pages (from-to)103-107
    JournalThin Solid Films
    Volume466
    Publication statusPublished - 2004
    MoE publication typeA1 Journal article-refereed

    Keywords

    • atomic layer deposition
    • magnesium aluminate
    • thin film

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