Original language | English |
---|---|
Pages (from-to) | 103-107 |
Journal | Thin Solid Films |
Volume | 466 |
Publication status | Published - 2004 |
MoE publication type | A1 Journal article-refereed |
Keywords
- atomic layer deposition
- magnesium aluminate
- thin film
Matti Putkonen, M. Nieminen, L. Niinistö
Research output: Contribution to journal › Article › Scientific › peer-review
Original language | English |
---|---|
Pages (from-to) | 103-107 |
Journal | Thin Solid Films |
Volume | 466 |
Publication status | Published - 2004 |
MoE publication type | A1 Journal article-refereed |