Magnesium aluminate thin films by atomic layer deposition from organometallic precursors and water

Matti Putkonen, Minna Nieminen, Lauri Niinistö

    Research output: Working paperProfessional

    14 Citations (Scopus)
    Original languageEnglish
    Place of PublicationTartu, Estonia
    Pages39
    Publication statusPublished - 2002
    MoE publication typeD4 Published development or research report or study

    Publication series

    NameThe Fifth Baltic Symposium on Atomic Layer Deposition (BALD-5), Tartu, Estonia, 24-26 October 2002
    PublisherInstitute of Physics, University of Tartu

    Keywords

    • ALD
    • organometallic precursors
    • thin films

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