Macropore formation in multilayer films

Research output: Working paperProfessional


Research units


Original languageEnglish
Place of PublicationItalia
PagesBook 2, s. 746
Publication statusPublished - 2004
MoE publication typeD4 Published development or research report or study

Publication series

Name16th International Vacuum Congress, Venice, Italy, 28.6.-2.7.2004
PublisherIUVSTA - International Union for Vacuum Science, Technique and Application

    Research areas

  • a-Si multilayers, hydrogen bubbles, macropore, PECVD, plasma treatment

ID: 3986135