Macropore formation in multilayer films

Research output: Working paperProfessional

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Details

Original languageEnglish
Place of PublicationItalia
PagesBook 2, s. 746
Publication statusPublished - 2004
MoE publication typeD4 Published development or research report or study

Publication series

Name16th International Vacuum Congress, Venice, Italy, 28.6.-2.7.2004
PublisherIUVSTA - International Union for Vacuum Science, Technique and Application

    Research areas

  • a-Si multilayers, hydrogen bubbles, macropore, PECVD, plasma treatment

ID: 3986135