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Low-temperature processes for MEMS device fabrication
Jyrki Kiihamäki*, Hannu Kattelus, Martti Blomberg, Riikka Puurunen, Mari Laamanen, Panu Pekko, Jaakko Saarilahti, Heini Ritala, Anna Rissanen
*Corresponding author for this work
Research output: Chapter in Book/Report/Conference proceeding › Chapter › Scientific › peer-review
7
Citations
(Scopus)