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Low-Temperature Molecular Layer Deposition Using Monofunctional Aromatic Precursors and Ozone-Based Ring-Opening Reactions
Laura Svärd*, Matti Putkonen, Eija Kenttä, Timo Sajavaara, Fabian Krahl, Maarit Karppinen, Kevin Van De Kerckhove, Christophe Detavernier, Pekka Simell
*Corresponding author for this work
Research output: Contribution to journal › Article › Scientific › peer-review