Low-Temperature Molecular Layer Deposition Using Monofunctional Aromatic Precursors and Ozone-Based Ring-Opening Reactions

Laura Svärd^*, Matti Putkonen, Eija Kenttä, Timo Sajavaara, Fabian Krahl, Maarit Karppinen, Kevin Van De Kerckhove, Christophe Detavernier, Pekka Simell

^*Corresponding author for this work