Low-temperature cleaning and oxidation of silicon surfaces

Zahra Jahanshah Rad*, Iris Mack, Juha Pekka Lehtiö, Ismo T. S. Heikkinen, Ville Vähänissi, Mikhail Kuzmin, M.P.J. Punkkinen, Risto Punkkinen, Hannu Pekka Hedman, Pekka Laukkanen, Hele Savin, Kalevi Kokko

*Corresponding author for this work

Research output: Contribution to conferencePosterScientific

Original languageEnglish
Publication statusPublished - 12 Dec 2019
MoE publication typeNot Eligible
EventIEEE Semiconductor Interface Specialists Conference - San Diego, United States
Duration: 11 Dec 201914 Dec 2019
Conference number: 50
http://www.ieeesisc.org

Conference

ConferenceIEEE Semiconductor Interface Specialists Conference
Abbreviated titleIEEE SISC
CountryUnited States
CitySan Diego
Period11/12/201914/12/2019
Internet address

Cite this