Low-temperature atomic layer deposition of ZnO thin films: Control of crystallinity and orientation

Jari Malm, Elina Sahramo, Juho Perala, Timo Sajavaara, Maarit Karppinen

    Research output: Contribution to journalArticleScientificpeer-review

    79 Citations (Scopus)
    Original languageEnglish
    Pages (from-to)5319-5322
    JournalThin Solid Films
    Issue number16
    Publication statusPublished - 2011
    MoE publication typeA1 Journal article-refereed

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