Low temperature and high quality atomic layer deposition HfO2 coatings

Alexander Pyymaki Perros, Perttu Sippola, Elisa Arduca, Leena Sisko Johansson, Harri Lipsanen

Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

2 Citations (Scopus)

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Engineering & Materials Science

Chemical Compounds