@techreport{7bc2ba68398e46afb80a85f63817dbb4,
title = "Low temperature ALE deposition of Y\_(2)O\_(3) thin films from beta-diketonate precursors",
keywords = "atomic layer epitaxy, crystal orientation, morphology, atomic layer epitaxy, crystal orientation, morphology, atomic layer epitaxy, crystal orientation, morphology",
author = "M. Putkonen and T. Sajavaara and J. Niinist{\"o} and L. Niinist{\"o}",
year = "2000",
language = "English",
series = "Finnish Chemical Congress and Exhibition, Helsinki, Finland, November 15-17, 2000",
publisher = "The Association of Finnish Chemical Societies",
pages = "40",
type = "WorkingPaper",
institution = "The Association of Finnish Chemical Societies",
}