Low temperature ALE deposition of Y_(2)O_(3) thin films from beta-diketonate precursors

M. Putkonen, T. Sajavaara, J. Niinistö, L. Niinistö

    Research output: Working paperProfessional

    Original languageEnglish
    Pages40
    Publication statusPublished - 2000
    MoE publication typeD4 Published development or research report or study

    Publication series

    NameFinnish Chemical Congress and Exhibition, Helsinki, Finland, November 15-17, 2000
    PublisherThe Association of Finnish Chemical Societies

    Keywords

    • atomic layer epitaxy
    • crystal orientation
    • morphology

    Cite this