| Original language | English |
|---|---|
| Pages (from-to) | 44-50 |
| Journal | Chemical Vapor Deposition |
| Issue number | 7 |
| Publication status | Published - 2001 |
| MoE publication type | A1 Journal article-refereed |
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Low-temperature ALE Deposition of Y2O3, Thin Films from beta-Diketonate Precursors
- M. Putkonen
- , T. Sajavaara
- , L.-S. Johansson
- , L. Niinistö
Research output: Contribution to journal › Article › Scientific › peer-review