Low-temperature ALE Deposition of Y2O3, Thin Films from beta-Diketonate Precursors

M. Putkonen, T. Sajavaara, L.-S. Johansson, L. Niinistö

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Cite this

@article{adbe8e6ccd31426182f17dee6a2af2f4,

title = "Low-temperature ALE Deposition of Y2O3, Thin Films from beta-Diketonate Precursors",

author = "M. Putkonen and T. Sajavaara and L.-S. Johansson and L. Niinist{\"o}",

year = "2001",

language = "English",

pages = "44--50",

journal = "Chemical Vapor Deposition",

issn = "1521-3862",

publisher = "Wiley-VCH Verlag",

number = "7",

}