Low-temperature ALE deposition of Y_(2)O_3 thin films from beta-diketonate precursors

Matti Putkonen, Timo Sajavaara, Leena-Sisko Johansson, Lauri Niinistö

    Research output: Contribution to journalArticleScientificpeer-review

    Original languageEnglish
    Pages (from-to)44-50
    JournalChemical Vapor Deposition
    Volume7
    Issue number1
    Publication statusPublished - 2001
    MoE publication typeA1 Journal article-refereed

    Keywords

    • ALE deposition
    • beta-diketonate
    • thin film
    • yttrium oxide

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