| Original language | English |
|---|---|
| Title of host publication | Baltic ALD 2010 & GerALD 2 -konferenssi, Hampuri, Saksa 16.-17.9.2010 |
| Publication status | Published - 2010 |
| MoE publication type | D3 Professional conference proceedings |
Low-temperature ALD of ZnO: film characteristics and applications
Jari Malm, Robin H. A. Ras, Maarit Karppinen
Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Professional