Low-temperature ALD of ZnO: film characteristics and applications

    Research output: Chapter in Book/Report/Conference proceedingConference contributionProfessional

    Original languageEnglish
    Title of host publicationBaltic ALD 2010 & GerALD 2 -konferenssi, Hampuri, Saksa 16.-17.9.2010
    Publication statusPublished - 2010
    MoE publication typeD3 Professional conference proceedings

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