Low-temperature ALD of ZnO: film characteristics and applications

Jari Malm, Robin H. A. Ras, Maarit Karppinen

    Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Professional

    Original languageEnglish
    Title of host publicationBaltic ALD 2010 & GerALD 2 -konferenssi, Hampuri, Saksa 16.-17.9.2010
    Publication statusPublished - 2010
    MoE publication typeD3 Professional conference proceedings

    Cite this

    Malm, J., Ras, R. H. A., & Karppinen, M. (2010). Low-temperature ALD of ZnO: film characteristics and applications. In Baltic ALD 2010 & GerALD 2 -konferenssi, Hampuri, Saksa 16.-17.9.2010