Low-pressure thermogravimetric analysis for finding sublimation temperatures for organic precursors in atomic/molecular layer deposition

Jenna Multia, Aida Khayyami, Juho Heiska, Maarit Karppinen^*

^*Corresponding author for this work

Research output: Contribution to journal › Article › Scientific › peer-review

1 Citation (Scopus)

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Raw Materials Research Infrastructure
Maarit Karppinen (Manager)
School of Chemical Engineering
Facility/equipment: Facility