Low-power front-ends for capacitive three-axis accelerometers

Mika Kämäräinen

    Research output: ThesisDoctoral ThesisCollection of Articles


    This thesis consists of six publications and an overview of the research topic. The overview concentrates on background information of the capacitive accelerometers and front-ends. The publications focus on two low-power front-ends that were implemented for capacitive three-axis accelerometers and their operation as a part of an interface. The switched-capacitor front-ends that were implemented are based on the charge-balancing structures, namely a self-balancing bridge and a ΔΣ front-end, which convert the capacitive acceleration information to analog and digital signals, respectively. Both structures operate mechanically in open-loop configuration and are capable of reducing the effects of the electrostatic forces and displacement-to-capacitance conversion. According to the performance comparison presented in this thesis, both interfaces, which were implemented around the front-ends, exhibit competitive performance when compared to the commercial products of the day.
    Translated title of the contributionLow-power front-ends for capacitive three-axis accelerometers
    Original languageEnglish
    QualificationDoctor's degree
    Awarding Institution
    • Aalto University
    • Halonen, Kari, Supervising Professor
    Print ISBNs978-952-60-3418-8
    Electronic ISBNs978-952-60-3419-5
    Publication statusPublished - 2010
    MoE publication typeG5 Doctoral dissertation (article)


    • capacitive three-axis accelerometer
    • electrostatic forces
    • front-end
    • power consumption

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