Low-nonlinearity and low-loss silicon slot waveguides with ALD-grown thin films

Lasse Karvonen; Antti Säynätjoki; Xiaoguang Tu; Tsung-Yang Liow; Marianne Hiltunen; Jussi Hiltunen; Ari Tervonen; Guo-Qiang Lo; Seppo Honkanen

doi:10.1117/12.921805

Low-nonlinearity and low-loss silicon slot waveguides with ALD-grown thin films

Lasse Karvonen
, Antti Säynätjoki
, Xiaoguang Tu
, Tsung-Yang Liow
, Marianne Hiltunen
, Jussi Hiltunen
, Ari Tervonen
, Guo-Qiang Lo
, Seppo Honkanen

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific

Original language	English
Title of host publication	Photonics Europe 2012: Conference on Silicon Photonics and Photonic Integrated Circuits III, Brussels, Belgium, April 16-19, 2012
Pages	Paper 8431-57
DOIs	https://doi.org/10.1117/12.921805
Publication status	Published - 2012
MoE publication type	B3 Non-refereed conference publication

Access to Document

10.1117/12.921805

Cite this

Karvonen, L., Säynätjoki, A., Tu, X., Liow, T.-Y., Hiltunen, M., Hiltunen, J., Tervonen, A., Lo, G.-Q., & Honkanen, S. (2012). Low-nonlinearity and low-loss silicon slot waveguides with ALD-grown thin films. In Photonics Europe 2012: Conference on Silicon Photonics and Photonic Integrated Circuits III, Brussels, Belgium, April 16-19, 2012 (pp. Paper 8431-57) https://doi.org/10.1117/12.921805

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title = "Low-nonlinearity and low-loss silicon slot waveguides with ALD-grown thin films",

author = "Lasse Karvonen and Antti S{\"a}yn{\"a}tjoki and Xiaoguang Tu and Tsung-Yang Liow and Marianne Hiltunen and Jussi Hiltunen and Ari Tervonen and Guo-Qiang Lo and Seppo Honkanen",

year = "2012",

doi = "10.1117/12.921805",

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booktitle = "Photonics Europe 2012: Conference on Silicon Photonics and Photonic Integrated Circuits III, Brussels, Belgium, April 16-19, 2012",

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Karvonen, L, Säynätjoki, A, Tu, X, Liow, T-Y, Hiltunen, M, Hiltunen, J, Tervonen, A, Lo, G-Q & Honkanen, S 2012, Low-nonlinearity and low-loss silicon slot waveguides with ALD-grown thin films. in Photonics Europe 2012: Conference on Silicon Photonics and Photonic Integrated Circuits III, Brussels, Belgium, April 16-19, 2012. pp. Paper 8431-57. https://doi.org/10.1117/12.921805

Low-nonlinearity and low-loss silicon slot waveguides with ALD-grown thin films. / Karvonen, Lasse; Säynätjoki, Antti; Tu, Xiaoguang et al.
Photonics Europe 2012: Conference on Silicon Photonics and Photonic Integrated Circuits III, Brussels, Belgium, April 16-19, 2012. 2012. p. Paper 8431-57.

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific

TY - GEN

T1 - Low-nonlinearity and low-loss silicon slot waveguides with ALD-grown thin films

AU - Karvonen, Lasse

AU - Säynätjoki, Antti

AU - Tu, Xiaoguang

AU - Liow, Tsung-Yang

AU - Hiltunen, Marianne

AU - Hiltunen, Jussi

AU - Tervonen, Ari

AU - Lo, Guo-Qiang

AU - Honkanen, Seppo

PY - 2012

Y1 - 2012

U2 - 10.1117/12.921805

DO - 10.1117/12.921805

M3 - Conference article in proceedings

SP - Paper 8431-57

BT - Photonics Europe 2012: Conference on Silicon Photonics and Photonic Integrated Circuits III, Brussels, Belgium, April 16-19, 2012

ER -