Low-nonlinearity and low-loss silicon slot waveguides with ALD-grown thin films

Lasse Karvonen, Antti Säynätjoki, Xiaoguang Tu, Tsung-Yang Liow, Marianne Hiltunen, Jussi Hiltunen, Ari Tervonen, Guo-Qiang Lo, Seppo Honkanen

    Research output: Chapter in Book/Report/Conference proceedingConference contributionScientific

    Original languageEnglish
    Title of host publicationPhotonics Europe 2012: Conference on Silicon Photonics and Photonic Integrated Circuits III, Brussels, Belgium, April 16-19, 2012
    PagesPaper 8431-57
    DOIs
    Publication statusPublished - 2012
    MoE publication typeB3 Non-refereed article in conference proceedings

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