Low Noise Silicon Micromechanical Bulk Acoustic Wave Oscillator

Ville Kaajakari; Pekka Rantakari; Jukka K. Koskinen; Tomi Mattila; Jyrki Kiihamäki; Mika Koskenvuori; Ilkka Tittonen; Aarne Oja

doi:10.1109/ULTSYM.2005.1603091

Low Noise Silicon Micromechanical Bulk Acoustic Wave Oscillator

Ville Kaajakari
, Pekka Rantakari
, Jukka K. Koskinen
, Tomi Mattila
, Jyrki Kiihamäki
, Mika Koskenvuori
, Ilkka Tittonen
, Aarne Oja

Department of Computer Science

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

9 Citations (Scopus)

Original language	English
Title of host publication	2005 IEEE Ultrasonics Symposium
Publisher	IEEE
ISBN (Electronic)	0-7803-9383-X
ISBN (Print)	0-7803-9382-1
DOIs	https://doi.org/10.1109/ULTSYM.2005.1603091
Publication status	Published - 2005
MoE publication type	A4 Conference publication
Event	IEEE International Ultrasonics Symposium - Rotterdam, Netherlands Duration: 18 Sept 2005 → 21 Sept 2005

Publication series

Name	IEEE International Ultrasonics Symposium, Rottedam, The Netherlands, 18-21 September

Conference

Conference	IEEE International Ultrasonics Symposium
Country/Territory	Netherlands
City	Rotterdam
Period	18/09/2005 → 21/09/2005

Keywords

micromechanics
reference oscillator
rf-mems

Access to Document

10.1109/ULTSYM.2005.1603091

Cite this

@inproceedings{a85530a527cb439abe702c9a819ee48b,

title = "Low Noise Silicon Micromechanical Bulk Acoustic Wave Oscillator",

keywords = "micromechanics, reference oscillator, rf-mems, micromechanics, reference oscillator, rf-mems, micromechanics, reference oscillator, rf-mems",

author = "Ville Kaajakari and Pekka Rantakari and Koskinen, \{Jukka K.\} and Tomi Mattila and Jyrki Kiiham{\"a}ki and Mika Koskenvuori and Ilkka Tittonen and Aarne Oja",

year = "2005",

doi = "10.1109/ULTSYM.2005.1603091",

language = "English",

isbn = "0-7803-9382-1 ",

series = "IEEE International Ultrasonics Symposium, Rottedam, The Netherlands, 18-21 September",

publisher = "IEEE",

booktitle = "2005 IEEE Ultrasonics Symposium",

address = "United States",

note = "IEEE International Ultrasonics Symposium ; Conference date: 18-09-2005 Through 21-09-2005",

}

Kaajakari, V, Rantakari, P, Koskinen, JK, Mattila, T, Kiihamäki, J, Koskenvuori, M, Tittonen, I & Oja, A 2005, Low Noise Silicon Micromechanical Bulk Acoustic Wave Oscillator. in 2005 IEEE Ultrasonics Symposium. IEEE International Ultrasonics Symposium, Rottedam, The Netherlands, 18-21 September, IEEE, IEEE International Ultrasonics Symposium, Rotterdam, Netherlands, 18/09/2005. https://doi.org/10.1109/ULTSYM.2005.1603091

Low Noise Silicon Micromechanical Bulk Acoustic Wave Oscillator. / Kaajakari, Ville; Rantakari, Pekka; Koskinen, Jukka K. et al.
2005 IEEE Ultrasonics Symposium. IEEE, 2005. (IEEE International Ultrasonics Symposium, Rottedam, The Netherlands, 18-21 September).

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

TY - GEN

T1 - Low Noise Silicon Micromechanical Bulk Acoustic Wave Oscillator

AU - Kaajakari, Ville

AU - Rantakari, Pekka

AU - Koskinen, Jukka K.

AU - Mattila, Tomi

AU - Kiihamäki, Jyrki

AU - Koskenvuori, Mika

AU - Tittonen, Ilkka

AU - Oja, Aarne

PY - 2005

Y1 - 2005

KW - micromechanics

KW - reference oscillator

KW - rf-mems

KW - micromechanics

KW - reference oscillator

KW - rf-mems

KW - micromechanics

KW - reference oscillator

KW - rf-mems

U2 - 10.1109/ULTSYM.2005.1603091

DO - 10.1109/ULTSYM.2005.1603091

M3 - Conference article in proceedings

SN - 0-7803-9382-1

T3 - IEEE International Ultrasonics Symposium, Rottedam, The Netherlands, 18-21 September

BT - 2005 IEEE Ultrasonics Symposium

PB - IEEE

T2 - IEEE International Ultrasonics Symposium

Y2 - 18 September 2005 through 21 September 2005

ER -