Low Noise Silicon Micromechanical Bulk Acoustic Wave Oscillator

Ville Kaajakari; Pekka Rantakari; Jukka K. Koskinen; Tomi Mattila; Jyrki Kiihamäki; Mika Koskenvuori; Ilkka Tittonen; Aarne Oja

doi:10.1109/ULTSYM.2005.1603091

Low Noise Silicon Micromechanical Bulk Acoustic Wave Oscillator

Ville Kaajakari, Pekka Rantakari, Jukka K. Koskinen, Tomi Mattila, Jyrki Kiihamäki, Mika Koskenvuori, Ilkka Tittonen, Aarne Oja

Department of Computer Science

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

9 Citations (Scopus)

Original language	English
Title of host publication	2005 IEEE Ultrasonics Symposium
Publisher	IEEE
ISBN (Electronic)	0-7803-9383-X
ISBN (Print)	0-7803-9382-1
DOIs	https://doi.org/10.1109/ULTSYM.2005.1603091
Publication status	Published - 2005
MoE publication type	A4 Conference publication
Event	IEEE International Ultrasonics Symposium - Rotterdam, Netherlands Duration: 18 Sept 2005 → 21 Sept 2005

Publication series

Name	IEEE International Ultrasonics Symposium, Rottedam, The Netherlands, 18-21 September

Conference

Conference	IEEE International Ultrasonics Symposium
Country/Territory	Netherlands
City	Rotterdam
Period	18/09/2005 → 21/09/2005

Keywords

micromechanics
reference oscillator
rf-mems

Access to Document

10.1109/ULTSYM.2005.1603091

Cite this

@inproceedings{a85530a527cb439abe702c9a819ee48b,

title = "Low Noise Silicon Micromechanical Bulk Acoustic Wave Oscillator",

keywords = "micromechanics, reference oscillator, rf-mems, micromechanics, reference oscillator, rf-mems, micromechanics, reference oscillator, rf-mems",

author = "Ville Kaajakari and Pekka Rantakari and Koskinen, {Jukka K.} and Tomi Mattila and Jyrki Kiiham{\"a}ki and Mika Koskenvuori and Ilkka Tittonen and Aarne Oja",

year = "2005",

doi = "10.1109/ULTSYM.2005.1603091",

language = "English",

isbn = "0-7803-9382-1 ",

series = "IEEE International Ultrasonics Symposium, Rottedam, The Netherlands, 18-21 September",

publisher = "IEEE",

booktitle = "2005 IEEE Ultrasonics Symposium",

address = "United States",

note = "IEEE International Ultrasonics Symposium ; Conference date: 18-09-2005 Through 21-09-2005",

}

Kaajakari, V, Rantakari, P, Koskinen, JK, Mattila, T, Kiihamäki, J, Koskenvuori, M, Tittonen, I & Oja, A 2005, Low Noise Silicon Micromechanical Bulk Acoustic Wave Oscillator. in 2005 IEEE Ultrasonics Symposium. IEEE International Ultrasonics Symposium, Rottedam, The Netherlands, 18-21 September, IEEE, IEEE International Ultrasonics Symposium, Rotterdam, Netherlands, 18/09/2005. https://doi.org/10.1109/ULTSYM.2005.1603091

Low Noise Silicon Micromechanical Bulk Acoustic Wave Oscillator. / Kaajakari, Ville; Rantakari, Pekka; Koskinen, Jukka K. et al.
2005 IEEE Ultrasonics Symposium. IEEE, 2005. (IEEE International Ultrasonics Symposium, Rottedam, The Netherlands, 18-21 September).

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

TY - GEN

T1 - Low Noise Silicon Micromechanical Bulk Acoustic Wave Oscillator

AU - Kaajakari, Ville

AU - Rantakari, Pekka

AU - Koskinen, Jukka K.

AU - Mattila, Tomi

AU - Kiihamäki, Jyrki

AU - Koskenvuori, Mika

AU - Tittonen, Ilkka

AU - Oja, Aarne

PY - 2005

Y1 - 2005

KW - micromechanics

KW - reference oscillator

KW - rf-mems

KW - micromechanics

KW - reference oscillator

KW - rf-mems

KW - micromechanics

KW - reference oscillator

KW - rf-mems

U2 - 10.1109/ULTSYM.2005.1603091

DO - 10.1109/ULTSYM.2005.1603091

M3 - Conference article in proceedings

SN - 0-7803-9382-1

T3 - IEEE International Ultrasonics Symposium, Rottedam, The Netherlands, 18-21 September

BT - 2005 IEEE Ultrasonics Symposium

PB - IEEE

T2 - IEEE International Ultrasonics Symposium

Y2 - 18 September 2005 through 21 September 2005

ER -