Low Noise Silicon Micromechanical Bulk Acoustic Wave Oscillator

Ville Kaajakari, Pekka Rantakari, Jukka K. Koskinen, Tomi Mattila, Jyrki Kiihamäki, Mika Koskenvuori, Ilkka Tittonen, Aarne Oja

Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

8 Citations (Scopus)
Original languageEnglish
Title of host publication2005 IEEE Ultrasonics Symposium
PublisherIEEE
ISBN (Electronic)0-7803-9383-X
ISBN (Print)0-7803-9382-1
DOIs
Publication statusPublished - 2005
MoE publication typeA4 Article in a conference publication
EventIEEE International Ultrasonics Symposium - Rotterdam, Netherlands
Duration: 18 Sep 200521 Sep 2005

Publication series

NameIEEE International Ultrasonics Symposium, Rottedam, The Netherlands, 18-21 September

Conference

ConferenceIEEE International Ultrasonics Symposium
CountryNetherlands
CityRotterdam
Period18/09/200521/09/2005

Keywords

  • micromechanics
  • reference oscillator
  • rf-mems

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