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Low-loss titanium dioxide strip waveguides fabricated by atomic layer deposition

  • Markus Häyrinen
  • , Matthieu Roussey
  • , Vishal Gandhi
  • , Petri Stenberg
  • , Antti Säynätjoki
  • , Lasse Karvonen
  • , Markku Kuittinen
  • , Seppo Honkanen

    Research output: Contribution to journalArticleScientificpeer-review

    54 Citations (Scopus)
    Original languageEnglish
    Pages (from-to)208-212
    JournalJournal of Lightwave Technology
    Volume32
    Issue number2
    DOIs
    Publication statusPublished - 2014
    MoE publication typeA1 Journal article-refereed

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