Low-loss titanium dioxide strip waveguides fabricated by atomic layer deposition

Markus Häyrinen; Matthieu Roussey; Vishal Gandhi; Petri Stenberg; Antti Säynätjoki; Lasse Karvonen; Markku Kuittinen; Seppo Honkanen

doi:10.1109/JLT.2013.2291960

Low-loss titanium dioxide strip waveguides fabricated by atomic layer deposition

Markus Häyrinen, Matthieu Roussey, Vishal Gandhi, Petri Stenberg, Antti Säynätjoki, Lasse Karvonen, Markku Kuittinen, Seppo Honkanen

Research output: Contribution to journal › Article › Scientific › peer-review

53 Citations (Scopus)

Original language	English
Pages (from-to)	208-212
Journal	Journal of Lightwave Technology
Volume	32
Issue number	2
DOIs	https://doi.org/10.1109/JLT.2013.2291960
Publication status	Published - 2014
MoE publication type	A1 Journal article-refereed

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10.1109/JLT.2013.2291960

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title = "Low-loss titanium dioxide strip waveguides fabricated by atomic layer deposition",

author = "Markus H{\"a}yrinen and Matthieu Roussey and Vishal Gandhi and Petri Stenberg and Antti S{\"a}yn{\"a}tjoki and Lasse Karvonen and Markku Kuittinen and Seppo Honkanen",

year = "2014",

doi = "10.1109/JLT.2013.2291960",

language = "English",

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pages = "208--212",

journal = "Journal of Lightwave Technology",

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T1 - Low-loss titanium dioxide strip waveguides fabricated by atomic layer deposition

AU - Häyrinen, Markus

AU - Roussey, Matthieu

AU - Gandhi, Vishal

AU - Stenberg, Petri

AU - Säynätjoki, Antti

AU - Karvonen, Lasse

AU - Kuittinen, Markku

AU - Honkanen, Seppo

PY - 2014

Y1 - 2014

UR - http://ieeexplore.ieee.org/stamp/stamp.jsp?arnumber=06671358

U2 - 10.1109/JLT.2013.2291960

DO - 10.1109/JLT.2013.2291960

M3 - Article

SN - 0733-8724

VL - 32

SP - 208

EP - 212

JO - Journal of Lightwave Technology

JF - Journal of Lightwave Technology

IS - 2

ER -

Low-loss titanium dioxide strip waveguides fabricated by atomic layer deposition

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Low-loss titanium dioxide strip waveguides fabricated by atomic layer deposition

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