Low-loss titanium dioxide strip waveguides by atomic layer deposition

Matthieu Roussey; Markus Häyrinen; Antti Säynätjoki; Vishal Gandhi; Lasse Karvonen; Petri Stenberg; Markku Kuittinen; Seppo Honkanen

doi:10.1117/12.2038912

Low-loss titanium dioxide strip waveguides by atomic layer deposition

Matthieu Roussey
, Markus Häyrinen
, Antti Säynätjoki
, Vishal Gandhi
, Lasse Karvonen
, Petri Stenberg
, Markku Kuittinen
, Seppo Honkanen

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific

1 Citation (Scopus)

215 Downloads (Pure)

Original language	English
Title of host publication	SPIE Photonics West 2014, San Francisco, California, USA, February 1-6, 2014
Editors	Michel J. F. Digonnet, Shibin Jiang
Publisher	SPIE
ISBN (Print)	978-0-8194-9895-3
DOIs	https://doi.org/10.1117/12.2038912
Publication status	Published - 2014
MoE publication type	B3 Non-refereed conference publication

Publication series

Name	Proceedings of SPIE
Volume	8982
ISSN (Print)	0277-786X

Access to Document

10.1117/12.2038912

89820EFinal published version, 1.1 MB

Cite this

Roussey, M., Häyrinen, M., Säynätjoki, A., Gandhi, V., Karvonen, L., Stenberg, P., Kuittinen, M., & Honkanen, S. (2014). Low-loss titanium dioxide strip waveguides by atomic layer deposition. In M. J. F. Digonnet, & S. Jiang (Eds.), SPIE Photonics West 2014, San Francisco, California, USA, February 1-6, 2014 Article UNSP 89820E (Proceedings of SPIE; Vol. 8982). SPIE. https://doi.org/10.1117/12.2038912

@inproceedings{25b84313ea8d43cc8f4fa1769b019650,

title = "Low-loss titanium dioxide strip waveguides by atomic layer deposition",

author = "Matthieu Roussey and Markus H{\"a}yrinen and Antti S{\"a}yn{\"a}tjoki and Vishal Gandhi and Lasse Karvonen and Petri Stenberg and Markku Kuittinen and Seppo Honkanen",

year = "2014",

doi = "10.1117/12.2038912",

language = "English",

isbn = "978-0-8194-9895-3",

series = "Proceedings of SPIE",

publisher = "SPIE",

editor = "\{J. F. Digonnet\}, Michel and Shibin Jiang",

booktitle = "SPIE Photonics West 2014, San Francisco, California, USA, February 1-6, 2014",

address = "United States",

}

Roussey, M, Häyrinen, M, Säynätjoki, A, Gandhi, V, Karvonen, L, Stenberg, P, Kuittinen, M & Honkanen, S 2014, Low-loss titanium dioxide strip waveguides by atomic layer deposition. in M J. F. Digonnet & S Jiang (eds), SPIE Photonics West 2014, San Francisco, California, USA, February 1-6, 2014., UNSP 89820E, Proceedings of SPIE, vol. 8982, SPIE. https://doi.org/10.1117/12.2038912

Low-loss titanium dioxide strip waveguides by atomic layer deposition. / Roussey, Matthieu; Häyrinen, Markus; Säynätjoki, Antti et al.
SPIE Photonics West 2014, San Francisco, California, USA, February 1-6, 2014. ed. / Michel J. F. Digonnet; Shibin Jiang. SPIE, 2014. UNSP 89820E (Proceedings of SPIE; Vol. 8982).

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific

TY - GEN

T1 - Low-loss titanium dioxide strip waveguides by atomic layer deposition

AU - Roussey, Matthieu

AU - Häyrinen, Markus

AU - Säynätjoki, Antti

AU - Gandhi, Vishal

AU - Karvonen, Lasse

AU - Stenberg, Petri

AU - Kuittinen, Markku

AU - Honkanen, Seppo

PY - 2014

Y1 - 2014

UR - http://proceedings.spiedigitallibrary.org/proceeding.aspx?articleid=1845616

U2 - 10.1117/12.2038912

DO - 10.1117/12.2038912

M3 - Conference article in proceedings

SN - 978-0-8194-9895-3

T3 - Proceedings of SPIE

BT - SPIE Photonics West 2014, San Francisco, California, USA, February 1-6, 2014

A2 - J. F. Digonnet, Michel

A2 - Jiang, Shibin

PB - SPIE

ER -

Low-loss titanium dioxide strip waveguides by atomic layer deposition

Publication series

Access to Document

Other files and links

Cite this