Low-loss titanium dioxide strip waveguides by atomic layer deposition

Matthieu Roussey, Markus Häyrinen, Antti Säynätjoki, Vishal Gandhi, Lasse Karvonen, Petri Stenberg, Markku Kuittinen, Seppo Honkanen

    Research output: Chapter in Book/Report/Conference proceedingConference contributionScientific

    90 Downloads (Pure)
    Original languageEnglish
    Title of host publicationSPIE Photonics West 2014, San Francisco, California, USA, February 1-6, 2014
    EditorsMichel J. F. Digonnet, Shibin Jiang
    DOIs
    Publication statusPublished - 2014
    MoE publication typeB3 Non-refereed article in conference proceedings

    Publication series

    NameProceedings of SPIE
    Volume8982
    ISSN (Print)0277-786X

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