Low-loss silicon slot waveguides and couplers fabricated with optical lithography and atomic layer deposition

Antti Säynätjoki, Lasse Karvonen, Tapani Alasaarela, X. Tu, T.Y. Liow, Marianne Hiltunen, Ari Tervonen, G.Q. Lo, Seppo Honkanen

    Research output: Contribution to journalArticleScientificpeer-review

    58 Citations (Scopus)
    Original languageEnglish
    Pages (from-to)26275-26282
    JournalOptics Express
    Volume19
    Issue number27
    DOIs
    Publication statusPublished - 2011
    MoE publication typeA1 Journal article-refereed

    Keywords

    • Integrated optics
    • Waveguides

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