@article{8f0fa6edc9364e5984601fe46d2a8b52,
title = "Low-Loss Multiple-Slot Waveguides Fabricated by Optical Lithography and Atomic Layer Deposition",
keywords = "ALD, integrated optics, slot waveguide, ALD, integrated optics, slot waveguide, ALD, integrated optics, slot waveguide",
author = "Lasse Karvonen and Antti S{\"a}yn{\"a}tjoki and Ya Chen and Xiaoguang Tu and Liow, {Tsung- Yang} and Jussi Hiltunen and Marianne Hiltunen and Guo-Qiang Lo and Seppo Honkanen",
year = "2012",
doi = "10.1109/LPT.2012.2219856",
language = "English",
volume = "24",
pages = "2074--2076",
journal = "IEEE Photonics Technology Letters",
issn = "1041-1135",
publisher = "IEEE",
number = "22",
}