Low-Loss Multiple-Slot Waveguides Fabricated by Optical Lithography and Atomic Layer Deposition

Lasse Karvonen, Antti Säynätjoki, Ya Chen, Xiaoguang Tu, Tsung- Yang Liow, Jussi Hiltunen, Marianne Hiltunen, Guo-Qiang Lo, Seppo Honkanen

    Research output: Contribution to journalArticleScientificpeer-review

    13 Citations (Scopus)
    Original languageEnglish
    Pages (from-to)2074-2076
    JournalIEEE Photonics Technology Letters
    Volume24
    Issue number22
    DOIs
    Publication statusPublished - 2012
    MoE publication typeA1 Journal article-refereed

    Keywords

    • ALD, integrated optics, slot waveguide

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