Low-Loss Multiple-Slot Waveguides Fabricated by Optical Lithography and Atomic Layer Deposition

Lasse Karvonen; Antti Säynätjoki; Ya Chen; Xiaoguang Tu; Tsung- Yang Liow; Jussi Hiltunen; Marianne Hiltunen; Guo-Qiang Lo; Seppo Honkanen

doi:10.1109/LPT.2012.2219856

Low-Loss Multiple-Slot Waveguides Fabricated by Optical Lithography and Atomic Layer Deposition

Lasse Karvonen, Antti Säynätjoki, Ya Chen, Xiaoguang Tu, Tsung- Yang Liow, Jussi Hiltunen, Marianne Hiltunen, Guo-Qiang Lo, Seppo Honkanen

Research output: Contribution to journal › Article › Scientific › peer-review

13 Citations (Scopus)

Original language	English
Pages (from-to)	2074-2076
Journal	IEEE Photonics Technology Letters
Volume	24
Issue number	22
DOIs	https://doi.org/10.1109/LPT.2012.2219856
Publication status	Published - 2012
MoE publication type	A1 Journal article-refereed

Keywords

ALD, integrated optics, slot waveguide

Access to Document

10.1109/LPT.2012.2219856

Cite this

@article{8f0fa6edc9364e5984601fe46d2a8b52,

title = "Low-Loss Multiple-Slot Waveguides Fabricated by Optical Lithography and Atomic Layer Deposition",

keywords = "ALD, integrated optics, slot waveguide, ALD, integrated optics, slot waveguide, ALD, integrated optics, slot waveguide",

author = "Lasse Karvonen and Antti S{\"a}yn{\"a}tjoki and Ya Chen and Xiaoguang Tu and Liow, {Tsung- Yang} and Jussi Hiltunen and Marianne Hiltunen and Guo-Qiang Lo and Seppo Honkanen",

year = "2012",

doi = "10.1109/LPT.2012.2219856",

language = "English",

volume = "24",

pages = "2074--2076",

journal = "IEEE Photonics Technology Letters",

issn = "1041-1135",

publisher = "IEEE",

number = "22",

}

Low-Loss Multiple-Slot Waveguides Fabricated by Optical Lithography and Atomic Layer Deposition. / Karvonen, Lasse; Säynätjoki, Antti; Chen, Ya; Tu, Xiaoguang; Liow, Tsung- Yang; Hiltunen, Jussi; Hiltunen, Marianne; Lo, Guo-Qiang; Honkanen, Seppo.

In: IEEE Photonics Technology Letters, Vol. 24, No. 22, 2012, p. 2074-2076.

Research output: Contribution to journal › Article › Scientific › peer-review

TY - JOUR

T1 - Low-Loss Multiple-Slot Waveguides Fabricated by Optical Lithography and Atomic Layer Deposition

AU - Karvonen, Lasse

AU - Säynätjoki, Antti

AU - Chen, Ya

AU - Tu, Xiaoguang

AU - Liow, Tsung- Yang

AU - Hiltunen, Jussi

AU - Hiltunen, Marianne

AU - Lo, Guo-Qiang

AU - Honkanen, Seppo

PY - 2012

Y1 - 2012

KW - ALD, integrated optics, slot waveguide

U2 - 10.1109/LPT.2012.2219856

DO - 10.1109/LPT.2012.2219856

M3 - Article

VL - 24

SP - 2074

EP - 2076

JO - IEEE Photonics Technology Letters

JF - IEEE Photonics Technology Letters

SN - 1041-1135

IS - 22

ER -