Loss reduction of silicon slot waveguides with ALD grown thin films

Antti Säynätjoki, Lasse Karvonen, Tapani Alasaarela, Dietmar Korn, Luca Alloatti, Ari Tervonen, Robert Palmer, Christian Koos, Juerg Leuthold, Wolfgang Freude, Seppo Honkanen

    Research output: Chapter in Book/Report/Conference proceedingConference contributionScientific

    1 Citation (Scopus)
    Original languageEnglish
    Title of host publicationPhotonics West 2012: Silicon Photonics VII, San Francisco, USA, January 21-26, 2012
    Pages82660
    DOIs
    Publication statusPublished - 2012
    MoE publication typeB3 Non-refereed article in conference proceedings

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