Lithium Aryloxide Thin Films with Guest-Induced Structural Transformation by ALD/MLD

Mikko Nisula, Jarno Linnera, Antti J. Karttunen, Maarit Karppinen*

*Corresponding author for this work

Research output: Contribution to journalArticleScientificpeer-review

20 Citations (Scopus)
414 Downloads (Pure)


Crystalline Li-organic thin films are grown with the atomic/molecular layer deposition (ALD/MLD) technique from lithium hexamethyldisilazide and hydroquinone. The as-deposited films are found to undergo a reversible structural transformation upon exposure to ambient humid air. According to density functional theory calculations, the guest-induced transformation may be related to an unsaturated Li site in the crystal structure.

Original languageEnglish
Pages (from-to)2988 – 2992
Number of pages5
Publication statusPublished - 2017
MoE publication typeA1 Journal article-refereed


  • Atomic layer deposition
  • Coordination polymer
  • Lithium organic hybrid
  • Molecular layer deposition
  • Thin film

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