Linear out-of-plane mode high-Q mechanical silicon oscillator

Ossi Hahtela, Nikolai Chekurov, Ilkka Tittonen

Research output: Working paperProfessional

Original languageEnglish
Publication statusPublished - 2005
MoE publication typeD4 Published development or research report or study

Publication series

NameXXXIX Annual Conference of the Finnish Physical Society, Espoo, March 17-19
ISSN (Print)0359-6214


  • high-Q mechanical oscillator
  • microsystems
  • single-crystal silicon

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