Light-optimized photovoltaic self-powered NO2 gas sensing based on black silicon

Yang Zhao, Xiao Long Liu, Sheng Xiang Ma, Wen Jing Wang, Xi Jing Ning, Li Zhao*, Jun Zhuang

*Corresponding author for this work

Research output: Contribution to journalArticleScientificpeer-review

Abstract

The NO2 sensing performance of a special lateral photovoltaic self-powered gas sensor based on the N-hyperdoped microstructured silicon (N-Si) is systematically studied under the different light illumination. The dependence of sensing characteristics on light intensity and wavelength is obtained, respectively. Results show that the sensing properties can be changed effectively by the different intensities and wavelengths, suggesting that a multidimensional regulation/optimization for the sensing characteristics is possible by light. More interestingly, the light with wavelength of 940 nm and intensity of ∼18 μW/cm2 could bring a comprehensive optimization for gas sensing, under which the N-Si sensor exhibits the excellent overall performance with simultaneously the low light power needed, good gas response, high sensitivity, wide detectable range and short response time at room temperature.

Original languageEnglish
Article number129985
Number of pages10
JournalSensors and Actuators, B: Chemical
Volume340
DOIs
Publication statusPublished - 1 Aug 2021
MoE publication typeA1 Journal article-refereed

Keywords

  • Black silicon
  • Gas sensor
  • Lateral photovoltaic effect
  • Nitrogen dioxide
  • Self-powered gas sensing

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