TY - JOUR
T1 - Light-optimized photovoltaic self-powered NO2 gas sensing based on black silicon
AU - Zhao, Yang
AU - Liu, Xiao Long
AU - Ma, Sheng Xiang
AU - Wang, Wen Jing
AU - Ning, Xi Jing
AU - Zhao, Li
AU - Zhuang, Jun
N1 - Funding Information:
This work is supported by the National Natural Science Foundation of China under grant no. 6207030573 , the National Basic Research Program of China (973 Program) under grant no. 2012CB934200 , and the Specialized Research Fund for the Doctoral Program of Higher Education under grant no. 20130071110018 .
Publisher Copyright:
© 2021 Elsevier B.V.
Copyright:
Copyright 2021 Elsevier B.V., All rights reserved.
PY - 2021/8/1
Y1 - 2021/8/1
N2 - The NO2 sensing performance of a special lateral photovoltaic self-powered gas sensor based on the N-hyperdoped microstructured silicon (N-Si) is systematically studied under the different light illumination. The dependence of sensing characteristics on light intensity and wavelength is obtained, respectively. Results show that the sensing properties can be changed effectively by the different intensities and wavelengths, suggesting that a multidimensional regulation/optimization for the sensing characteristics is possible by light. More interestingly, the light with wavelength of 940 nm and intensity of ∼18 μW/cm2 could bring a comprehensive optimization for gas sensing, under which the N-Si sensor exhibits the excellent overall performance with simultaneously the low light power needed, good gas response, high sensitivity, wide detectable range and short response time at room temperature.
AB - The NO2 sensing performance of a special lateral photovoltaic self-powered gas sensor based on the N-hyperdoped microstructured silicon (N-Si) is systematically studied under the different light illumination. The dependence of sensing characteristics on light intensity and wavelength is obtained, respectively. Results show that the sensing properties can be changed effectively by the different intensities and wavelengths, suggesting that a multidimensional regulation/optimization for the sensing characteristics is possible by light. More interestingly, the light with wavelength of 940 nm and intensity of ∼18 μW/cm2 could bring a comprehensive optimization for gas sensing, under which the N-Si sensor exhibits the excellent overall performance with simultaneously the low light power needed, good gas response, high sensitivity, wide detectable range and short response time at room temperature.
KW - Black silicon
KW - Gas sensor
KW - Lateral photovoltaic effect
KW - Nitrogen dioxide
KW - Self-powered gas sensing
UR - http://www.scopus.com/inward/record.url?scp=85104685895&partnerID=8YFLogxK
U2 - 10.1016/j.snb.2021.129985
DO - 10.1016/j.snb.2021.129985
M3 - Article
AN - SCOPUS:85104685895
SN - 0925-4005
VL - 340
JO - Sensors and Actuators, B: Chemical
JF - Sensors and Actuators, B: Chemical
M1 - 129985
ER -