Light metrology based on inverse scattering analysis and artificial neural networks

J. Saarinen, E. Noponen, E. Oja, O. Simula

    Research output: Working paperProfessional

    Original languageEnglish
    Place of PublicationTampere
    Publication statusPublished - 1997
    MoE publication typeD4 Published development or research report or study

    Publication series

    NameOptics Day '97, Tampere, 21.3.1997
    PublisherFinnish Optical Society

    Keywords

    • diffraction gratings
    • diffractive optics
    • micro-optics
    • rigorous diffraction theory

    Cite this

    Saarinen, J., Noponen, E., Oja, E., & Simula, O. (1997). Light metrology based on inverse scattering analysis and artificial neural networks. (Optics Day '97, Tampere, 21.3.1997).