Layer-by-layer deposition of Ti-ODA hybrid thin films

Pia Sundberg, Anjali Sood, Jari Malm, Matti Putkonen, Maarit Karppinen

    Research output: Chapter in Book/Report/Conference proceedingConference contributionProfessional

    Original languageEnglish
    Title of host publicationBaltic ALD 2010 & GerALD 2 -konferenssi, Hampuri, Saksa 16.-17.9.2010
    Publication statusPublished - 2010
    MoE publication typeD3 Professional conference proceedings

    Cite this