| Original language | English |
|---|---|
| Title of host publication | 47th annual conference of the Finnish Physical Society (Physics Days 2013), Espoo, Finland, March 14-16, 2013 |
| Publication status | Published - 2013 |
| MoE publication type | B3 Non-refereed conference publication |
Lattice impurity-related stress in micromechanical silicon devices
Päivi Sievilä, Ilkka Tittonen
Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific