Lattice impurity-related stress in micromechanical silicon devices

Päivi Sievilä, Ilkka Tittonen

Research output: Chapter in Book/Report/Conference proceedingConference contributionScientific

Original languageEnglish
Title of host publication47th annual conference of the Finnish Physical Society (Physics Days 2013), Espoo, Finland, March 14-16, 2013
Publication statusPublished - 2013
MoE publication typeB3 Non-refereed article in conference proceedings

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