Laser Probe Measurements of Plate-Size Related Effects on the Square-Extensional Mode of Piezoelectrically Transduced MEMS Resonators

Lauri Lipiäinen, Kimmo Kokkonen, A. Jaakkola, Matti Kaivola

Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

1 Citation (Scopus)
Original languageEnglish
Title of host publicationIEEE International Ultrasonics Symposium, San Diego, CA, USA, October 11-14, 2010
Publication statusPublished - 2010
MoE publication typeA4 Article in a conference publication

Keywords

  • Interferometry
  • MEMS
  • Piezoelectricity

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