Laser Probe Measurements of Plate-Size Related Effects on the Square-Extensional Mode of Piezoelectrically Transduced MEMS Resonators

Lauri Lipiäinen, Kimmo Kokkonen, A. Jaakkola, Matti Kaivola

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Scientific › peer-review

1 Citation (Scopus)

Original language	English
Title of host publication	IEEE International Ultrasonics Symposium, San Diego, CA, USA, October 11-14, 2010
Publication status	Published - 2010
MoE publication type	A4 Article in a conference publication

Keywords

@inproceedings{d54ca698a39445fc875721df3de40a8c,

title = "Laser Probe Measurements of Plate-Size Related Effects on the Square-Extensional Mode of Piezoelectrically Transduced MEMS Resonators",

keywords = "Interferometry, MEMS, Piezoelectricity, Interferometry, MEMS, Piezoelectricity, Interferometry, MEMS, Piezoelectricity",

author = "Lauri Lipi{\"a}inen and Kimmo Kokkonen and A. Jaakkola and Matti Kaivola",

year = "2010",

language = "English",

booktitle = "IEEE International Ultrasonics Symposium, San Diego, CA, USA, October 11-14, 2010",

}

IEEE International Ultrasonics Symposium, San Diego, CA, USA, October 11-14, 2010. 2010.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Scientific › peer-review

TY - GEN

T1 - Laser Probe Measurements of Plate-Size Related Effects on the Square-Extensional Mode of Piezoelectrically Transduced MEMS Resonators

AU - Lipiäinen, Lauri

AU - Kokkonen, Kimmo

AU - Jaakkola, A.

AU - Kaivola, Matti

PY - 2010

Y1 - 2010

KW - Interferometry

KW - MEMS

KW - Piezoelectricity

KW - Interferometry

KW - MEMS

KW - Piezoelectricity

KW - Interferometry

KW - MEMS

KW - Piezoelectricity

M3 - Conference contribution

BT - IEEE International Ultrasonics Symposium, San Diego, CA, USA, October 11-14, 2010

ER -