Laser Interferometric Measurement of Lamb Wave Dispersion and Extraction of Material Parameters in FBARs

T. Makkonen, T. Pensala, J. Vartiainen, J. Knuuttila, J. Kaitila, O. Holmgren, M.M. Salomaa

    Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

    11 Citations (Scopus)
    Original languageEnglish
    Title of host publication2002 IEEE Ultrasonics Symposium, München 2002
    Pages952-955
    Publication statusPublished - 2002
    MoE publication typeA4 Article in a conference publication

    Keywords

    • dispersion
    • laser-interferometric imaging
    • thin-film bulk-acoustic resonator

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