Laser direct writing of thick hybrid polymer microstructures

Akanksha Singh, Gianmario Scotti, Ville Jokinen, Sami Franssila

Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

1 Citation (Scopus)


This work presents patterning of thick (10-50 μm) hybrid polymer structures in ORMOCER (Organically Modified Ceramics) by rapid laser direct writing (LDW). ORMOCERs combine polymer-like fabrication processes with glass-like surface chemistry that is beneficial for biochips. In our study, different process parameters of laser-writer were studied, in order to find the optimal dose for each of the laser beam spot sizes and for different ORMOCOMP® layer thickness. LDW enables superior control over structure geometry and different shapes i.e. pillars, ridges and triangles were written in a single step on silicon substrate. Round pillars of height 49 μm (spinned at 2000 rpm) were obtained using optimized process parameters of laser writer. The ORMOCOMP® triangles of 10 μm height corresponding to spin coating at 10000 rpm with 30°, 45°and 90°angles were obtained. The sharpness of corners in these triangles (a few micrometers) indicates that LDW of ORMOCOMP® microstructures has advantages over proximity lithography and is useful for applications requiring high definition and edge roughness. Microfluidic directional wetting (fluidic diode) replicated in ORMOCOMP® by LDW was also tested. The objective of this work is to design and to fabricate micrometer range chips patterned by LDW for microfluidic applications.

Original languageEnglish
Title of host publication2013 Transducers and Eurosensors XXVII
Subtitle of host publicationThe 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013
Number of pages4
Publication statusPublished - 2013
MoE publication typeA4 Article in a conference publication
EventInternational Conference on Solid-State Sensors, Actuators and Microsystems - Barcelona, Spain
Duration: 16 Jun 201320 Jun 2013
Conference number: 17


ConferenceInternational Conference on Solid-State Sensors, Actuators and Microsystems
Abbreviated titleTransducers


  • biocompatible
  • directional wetting
  • LDW
  • microfluidics
  • microstructures
  • pillars


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