Large-Displacement Modelling and Simulation of Micromechanical Electrostatically Driven Resonators Using the Harmonic Balance Method

T. Veijola, T. Mattila, O. Jaakkola, J. Kiihamäki, T. Lamminmäki, A. Oja, K. Ruokonen, H. Seppä, Pekka Seppälä, I. Tittonen

Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

39 Citations (Scopus)
Original languageEnglish
Title of host publication2000 IEEE MTT-S International Microwave Symposium, Boston, 11-16.6.2000
EditorsThomas Perkins, John Wendler
Place of PublicationBoston, Massachussetts, USA
Pages99-102
Publication statusPublished - 2000
MoE publication typeA4 Article in a conference publication

Keywords

  • beam resonator
  • elongation stress
  • equivalent circuit model
  • harmonic balance method
  • micromechanics

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