Kinetic physical etching for versatile novel design of well ordered self-affine nanogrooves

Sebastiaan van Dijken, Dennis De Bruin, Bene Poelsema*

*Corresponding author for this work

Research output: Contribution to journalArticleScientificpeer-review

55 Citations (Scopus)

Abstract

Kinetic etching for novel design of well ordered self-affine nanogrooves was presented. The method of high-resolution electron diffraction was used in the investigation to provide wanted information directly. The experiment were conducted in ultrahigh vaccum with substrate temperature quenched to 100K after switching off the etching ion beams, to minimize possibly disturbing annealing.

Original languageEnglish
Pages (from-to)4608-4611
Number of pages4
JournalPhysical Review Letters
Volume86
Issue number20
DOIs
Publication statusPublished - 14 May 2001
MoE publication typeA1 Journal article-refereed

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