Abstract
Kinetic etching for novel design of well ordered self-affine nanogrooves was presented. The method of high-resolution electron diffraction was used in the investigation to provide wanted information directly. The experiment were conducted in ultrahigh vaccum with substrate temperature quenched to 100K after switching off the etching ion beams, to minimize possibly disturbing annealing.
| Original language | English |
|---|---|
| Pages (from-to) | 4608-4611 |
| Number of pages | 4 |
| Journal | Physical Review Letters |
| Volume | 86 |
| Issue number | 20 |
| DOIs | |
| Publication status | Published - 14 May 2001 |
| MoE publication type | A1 Journal article-refereed |